Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

R. G. Elliman; H. Timmers; G. R. Palmer; T. R. Ophel

doi:10.1016/S0168-583X(97)00879-3

Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

R. G. Elliman^*, H. Timmers, G. R. Palmer, T. R. Ophel

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

The depth resolution of heavy-ion elastic recoil detection analysis (HIERDA) was examined for Al and Co thin films ranging in thickness from 100 to 400 nm. Measurements were performed with 154 MeV Au ions as the incident beam, and recoils were detected using a gas ionisation detector. Energy spectra were extracted for the Al and Co recoils and the depth resolution determined as a function of film thickness from the width of the high- and low-energy edges. These results were compared with theoretical estimates calculated using the computer program DEPTH.

Original language	English
Pages (from-to)	649-653
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	136-138
DOIs	https://doi.org/10.1016/S0168-583X(97)00879-3
Publication status	Published - Mar 1998

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title = "Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis",

abstract = "The depth resolution of heavy-ion elastic recoil detection analysis (HIERDA) was examined for Al and Co thin films ranging in thickness from 100 to 400 nm. Measurements were performed with 154 MeV Au ions as the incident beam, and recoils were detected using a gas ionisation detector. Energy spectra were extracted for the Al and Co recoils and the depth resolution determined as a function of film thickness from the width of the high- and low-energy edges. These results were compared with theoretical estimates calculated using the computer program DEPTH.",

keywords = "Depth resolution, Elastic recoil detection analysis, Ion beam analysis",

author = "Elliman, {R. G.} and H. Timmers and Palmer, {G. R.} and Ophel, {T. R.}",

year = "1998",

month = mar,

doi = "10.1016/S0168-583X(97)00879-3",

language = "English",

volume = "136-138",

pages = "649--653",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

AU - Elliman, R. G.

AU - Timmers, H.

AU - Palmer, G. R.

AU - Ophel, T. R.

PY - 1998/3

Y1 - 1998/3

N2 - The depth resolution of heavy-ion elastic recoil detection analysis (HIERDA) was examined for Al and Co thin films ranging in thickness from 100 to 400 nm. Measurements were performed with 154 MeV Au ions as the incident beam, and recoils were detected using a gas ionisation detector. Energy spectra were extracted for the Al and Co recoils and the depth resolution determined as a function of film thickness from the width of the high- and low-energy edges. These results were compared with theoretical estimates calculated using the computer program DEPTH.

AB - The depth resolution of heavy-ion elastic recoil detection analysis (HIERDA) was examined for Al and Co thin films ranging in thickness from 100 to 400 nm. Measurements were performed with 154 MeV Au ions as the incident beam, and recoils were detected using a gas ionisation detector. Energy spectra were extracted for the Al and Co recoils and the depth resolution determined as a function of film thickness from the width of the high- and low-energy edges. These results were compared with theoretical estimates calculated using the computer program DEPTH.

KW - Depth resolution

KW - Elastic recoil detection analysis

KW - Ion beam analysis

UR - http://www.scopus.com/inward/record.url?scp=0032017649&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(97)00879-3

DO - 10.1016/S0168-583X(97)00879-3

M3 - Article

SN - 0168-583X

VL - 136-138

SP - 649

EP - 653

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

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