Limiting factor for a piezoelectric tube scanner

M. S. Rana; H. R. Pota; I. R. Petersen; H. Habibullah

doi:10.1109/ACC.2016.7526841

Limiting factor for a piezoelectric tube scanner

M. S. Rana, H. R. Pota, I. R. Petersen, H. Habibullah

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Citations (Scopus)

Abstract

In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. However, PTS suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; and (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs). This paper presents a survey of the literature on the PTS, an overview of a few emerging innovative solutions for its nanopositioning and future research directions.

Original language	English
Title of host publication	2016 American Control Conference, ACC 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	7402-7407
Number of pages	6
ISBN (Electronic)	9781467386821
DOIs	https://doi.org/10.1109/ACC.2016.7526841
Publication status	Published - 28 Jul 2016
Externally published	Yes
Event	2016 American Control Conference, ACC 2016 - Boston, United States Duration: 6 Jul 2016 → 8 Jul 2016

Publication series

Name	Proceedings of the American Control Conference
Volume	2016-July
ISSN (Print)	0743-1619

Conference

Conference	2016 American Control Conference, ACC 2016
Country/Territory	United States
City	Boston
Period	6/07/16 → 8/07/16

Access to Document

10.1109/ACC.2016.7526841

Cite this

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title = "Limiting factor for a piezoelectric tube scanner",

abstract = "In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. However, PTS suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; and (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs). This paper presents a survey of the literature on the PTS, an overview of a few emerging innovative solutions for its nanopositioning and future research directions.",

author = "Rana, {M. S.} and Pota, {H. R.} and Petersen, {I. R.} and H. Habibullah",

note = "Publisher Copyright: {\textcopyright} 2016 American Automatic Control Council (AACC).; 2016 American Control Conference, ACC 2016 ; Conference date: 06-07-2016 Through 08-07-2016",

year = "2016",

month = jul,

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doi = "10.1109/ACC.2016.7526841",

language = "English",

series = "Proceedings of the American Control Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2016 American Control Conference, ACC 2016",

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}

Rana, MS, Pota, HR, Petersen, IR & Habibullah, H 2016, Limiting factor for a piezoelectric tube scanner. in 2016 American Control Conference, ACC 2016., 7526841, Proceedings of the American Control Conference, vol. 2016-July, Institute of Electrical and Electronics Engineers Inc., pp. 7402-7407, 2016 American Control Conference, ACC 2016, Boston, United States, 6/07/16. https://doi.org/10.1109/ACC.2016.7526841

Limiting factor for a piezoelectric tube scanner. / Rana, M. S.; Pota, H. R.; Petersen, I. R. et al.
2016 American Control Conference, ACC 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 7402-7407 7526841 (Proceedings of the American Control Conference; Vol. 2016-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Limiting factor for a piezoelectric tube scanner

AU - Rana, M. S.

AU - Pota, H. R.

AU - Petersen, I. R.

AU - Habibullah, H.

PY - 2016/7/28

Y1 - 2016/7/28

N2 - In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. However, PTS suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; and (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs). This paper presents a survey of the literature on the PTS, an overview of a few emerging innovative solutions for its nanopositioning and future research directions.

AB - In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. However, PTS suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; and (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs). This paper presents a survey of the literature on the PTS, an overview of a few emerging innovative solutions for its nanopositioning and future research directions.

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DO - 10.1109/ACC.2016.7526841

M3 - Conference contribution

T3 - Proceedings of the American Control Conference

SP - 7402

EP - 7407

BT - 2016 American Control Conference, ACC 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2016 American Control Conference, ACC 2016

Y2 - 6 July 2016 through 8 July 2016

ER -

Limiting factor for a piezoelectric tube scanner

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