@inproceedings{30a85f880f4544d6ac9aecec7a955eca,
title = "Limiting factor for a piezoelectric tube scanner",
abstract = "In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. However, PTS suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; and (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs). This paper presents a survey of the literature on the PTS, an overview of a few emerging innovative solutions for its nanopositioning and future research directions.",
author = "Rana, \{M. S.\} and Pota, \{H. R.\} and Petersen, \{I. R.\} and H. Habibullah",
note = "Publisher Copyright: {\textcopyright} 2016 American Automatic Control Council (AACC).; 2016 American Control Conference, ACC 2016 ; Conference date: 06-07-2016 Through 08-07-2016",
year = "2016",
month = jul,
day = "28",
doi = "10.1109/ACC.2016.7526841",
language = "English",
series = "Proceedings of the American Control Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "7402--7407",
booktitle = "2016 American Control Conference, ACC 2016",
address = "United States",
}