Abstract
We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ̃50 pm for our custom Glan-Laser interferometer and ̃100 pm for a commercial interferometer.
Original language | English |
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Pages (from-to) | 2448-2450 |
Number of pages | 3 |
Journal | Optics Letters |
Volume | 37 |
Issue number | 13 |
DOIs | |
Publication status | Published - 1 Jul 2012 |