Linearization and minimization of cyclic error with heterodyne laser interferometry

Terry G. McRae*, Magnus T.L. Hsu, Christopher H. Freund, Daniel A. Shaddock, Jan Herrmann, Malcolm B. Gray

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    20 Citations (Scopus)

    Abstract

    We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ̃50 pm for our custom Glan-Laser interferometer and ̃100 pm for a commercial interferometer.

    Original languageEnglish
    Pages (from-to)2448-2450
    Number of pages3
    JournalOptics Letters
    Volume37
    Issue number13
    DOIs
    Publication statusPublished - 1 Jul 2012

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