Linearization and minimization of cyclic error with heterodyne laser interferometry

We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ̃50 pm for our custom Glan-Laser interferometer and ̃100 pm for a commercial interferometer.