Local structures of free-standing AlxGa1-xN thin films studied by extended x-ray absorption fine structure

Kin Man Yu*, W. Shan, C. J. Glover, M. C. Ridgway, William S. Wong, W. Yang

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    21 Citations (Scopus)

    Abstract

    Local structural information for the first two atomic shells surrounding Ga atoms in free standing AlxGa1-xN alloy films has been obtained by extended x-ray absorption fine structure spectroscopy. For an AlN mole fraction ranging from 0 to 0.6, we found that the first shell Ga-N bond length had only a weak composition dependence, roughly one quarter of that predicted by Vegard's Law. In the second shell, the Ga-Ga bond length was significantly longer than that of Ga-Al (Δ∼0.04-0.065 Å). A bond-type specific composition dependence was observed for the second shell cation-cation distances. While the composition dependence of the Ga-Ga bond length is ∼70% of that predicted by Vegard's Law, the Ga-Al bond length was essentially composition independent. These results suggested that local strain in AlxGa1-xN was also accommodated by lattice distortion in the Al cation sublattice.

    Original languageEnglish
    Pages (from-to)4097-4099
    Number of pages3
    JournalApplied Physics Letters
    Volume75
    Issue number26
    DOIs
    Publication statusPublished - 1999

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