Abstract
The influence of intense x-ray irradiation on the local bonding structure of Ga dopants in both hydrogen-free (a-Si) and hydrogenated (a-Si:H) amorphous Si thin films has been studied. Prior to x-ray exposure, extended x-ray absorption fine structure measurements revealed that H reduced the static disorder around the Ga atoms in amorphous Si. Thereafter, x-ray irradiation modified the local structure in the a-Si and a-Si:H samples. The Ga coordination number increased from <3.5 to ~3.80 atoms for both types of amorphous material as consistent with a greater fraction of electrically active, tetrahedrally coordinated dopant atoms. Also, greater structural disorder was observed around Ga atoms after x-ray irradiation suggesting that tetrahedrally coordinated Ga atoms were less well ordered than in threefold-coordinated sites.
Original language | English |
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Pages (from-to) | 3282-3284 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 75 |
Issue number | 21 |
DOIs | |
Publication status | Published - 22 Nov 1999 |