Low energy electron-molecule collision cross sections

Stephen J. Buckman; Radmila Panajotovic; Milica Jelisavcic

doi:10.1238/Physica.Topical.110a00166

Low energy electron-molecule collision cross sections

Stephen J. Buckman, Radmila Panajotovic, Milica Jelisavcic

Research output: Contribution to journal › Conference article › peer-review

4 Citations (Scopus)

Abstract

Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C₂F₄ and C₄F₈, which are used in plasma processing of semiconductors, we present a range of experimental data. In each case we make comparison of the measured cross sections with results derived from the analysis of transport data from electron swarm experiments.

Original language	English
Pages (from-to)	166-171
Number of pages	6
Journal	Physica Scripta
Volume	T110
DOIs	https://doi.org/10.1238/Physica.Topical.110a00166
Publication status	Published - 2004
Event	XXIII International Conference on Photonic, Electronic, and Atomic Collisions, 23rd ICPEAC - Stockholm, Sweden Duration: 23 Jul 2003 → 29 Jul 2003

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10.1238/Physica.Topical.110a00166

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abstract = "Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental data. In each case we make comparison of the measured cross sections with results derived from the analysis of transport data from electron swarm experiments.",

author = "Buckman, {Stephen J.} and Radmila Panajotovic and Milica Jelisavcic",

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doi = "10.1238/Physica.Topical.110a00166",

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AU - Buckman, Stephen J.

AU - Panajotovic, Radmila

AU - Jelisavcic, Milica

PY - 2004

Y1 - 2004

N2 - Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental data. In each case we make comparison of the measured cross sections with results derived from the analysis of transport data from electron swarm experiments.

AB - Recent progress in the measurement of absolute collision cross sections for electron molecule scattering is discussed in the context of measurements which have relevance to atmospheric phenomena and technological applications. Cross sections for low energy (< 5 eV) scattering from NO highlight the role of resonant processes in the excitation of this important atmospheric gas, while for both C2F4 and C4F8, which are used in plasma processing of semiconductors, we present a range of experimental data. In each case we make comparison of the measured cross sections with results derived from the analysis of transport data from electron swarm experiments.

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U2 - 10.1238/Physica.Topical.110a00166

DO - 10.1238/Physica.Topical.110a00166

M3 - Conference article

SN - 0031-8949

VL - T110

SP - 166

EP - 171

JO - Physica Scripta

JF - Physica Scripta

T2 - XXIII International Conference on Photonic, Electronic, and Atomic Collisions, 23rd ICPEAC

Y2 - 23 July 2003 through 29 July 2003

ER -

Low energy electron-molecule collision cross sections

Abstract

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