Low loss and dispersion engineered ZnSe waveguides at telecom wavelengths

Yiming Fang; Zhen Yang; Chengdong Li; Peipeng Xu; Kunlun Yan; Yan Sheng; Haizheng Tao; Rongping Wang

doi:10.1063/5.0045684

Low loss and dispersion engineered ZnSe waveguides at telecom wavelengths

Yiming Fang^*
, Zhen Yang
, Chengdong Li
, Peipeng Xu
, Kunlun Yan
, Yan Sheng
, Haizheng Tao
, Rongping Wang^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We have successfully fabricated a dispersion engineered ZnSe waveguide. The ZnSe film was deposited on a CaF₂ substrate by radio frequency magnetron sputtering, and the waveguide was patterned directly on the ZnSe films by UV lithography and inductively coupled plasma etching. The nonlinear coefficient in the 4-μm-width waveguide was calculated to be 0.73 w⁻¹ m⁻¹ for both TE and TM modes at 1.55 µm. The loss of the ZnSe rib waveguides was measured to be 4.3 dB/cm at 1550 nm using the cut-back method.

Original language	English
Article number	065303
Journal	AIP Advances
Volume	11
Issue number	6
DOIs	https://doi.org/10.1063/5.0045684
Publication status	Published - 1 Jun 2021

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title = "Low loss and dispersion engineered ZnSe waveguides at telecom wavelengths",

abstract = "We have successfully fabricated a dispersion engineered ZnSe waveguide. The ZnSe film was deposited on a CaF2 substrate by radio frequency magnetron sputtering, and the waveguide was patterned directly on the ZnSe films by UV lithography and inductively coupled plasma etching. The nonlinear coefficient in the 4-μm-width waveguide was calculated to be 0.73 w−1 m−1 for both TE and TM modes at 1.55 µm. The loss of the ZnSe rib waveguides was measured to be 4.3 dB/cm at 1550 nm using the cut-back method.",

author = "Yiming Fang and Zhen Yang and Chengdong Li and Peipeng Xu and Kunlun Yan and Yan Sheng and Haizheng Tao and Rongping Wang",

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T1 - Low loss and dispersion engineered ZnSe waveguides at telecom wavelengths

AU - Fang, Yiming

AU - Yang, Zhen

AU - Li, Chengdong

AU - Xu, Peipeng

AU - Yan, Kunlun

AU - Sheng, Yan

AU - Tao, Haizheng

AU - Wang, Rongping

PY - 2021/6/1

Y1 - 2021/6/1

N2 - We have successfully fabricated a dispersion engineered ZnSe waveguide. The ZnSe film was deposited on a CaF2 substrate by radio frequency magnetron sputtering, and the waveguide was patterned directly on the ZnSe films by UV lithography and inductively coupled plasma etching. The nonlinear coefficient in the 4-μm-width waveguide was calculated to be 0.73 w−1 m−1 for both TE and TM modes at 1.55 µm. The loss of the ZnSe rib waveguides was measured to be 4.3 dB/cm at 1550 nm using the cut-back method.

AB - We have successfully fabricated a dispersion engineered ZnSe waveguide. The ZnSe film was deposited on a CaF2 substrate by radio frequency magnetron sputtering, and the waveguide was patterned directly on the ZnSe films by UV lithography and inductively coupled plasma etching. The nonlinear coefficient in the 4-μm-width waveguide was calculated to be 0.73 w−1 m−1 for both TE and TM modes at 1.55 µm. The loss of the ZnSe rib waveguides was measured to be 4.3 dB/cm at 1550 nm using the cut-back method.

UR - https://www.scopus.com/pages/publications/85107416942

U2 - 10.1063/5.0045684

DO - 10.1063/5.0045684

M3 - Article

SN - 2158-3226

VL - 11

JO - AIP Advances

JF - AIP Advances

IS - 6

M1 - 065303

ER -

Low loss and dispersion engineered ZnSe waveguides at telecom wavelengths

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