Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han; Steve Madden; Douglas Bulla; Barry Luther-Davies

doi:10.1364/OE.18.019286

Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han^*, Steve Madden, Douglas Bulla, Barry Luther-Davies

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

79 Citations (Scopus)

Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

Original language	English
Pages (from-to)	19286-19291
Number of pages	6
Journal	Optics Express
Volume	18
Issue number	18
DOIs	https://doi.org/10.1364/OE.18.019286
Publication status	Published - 30 Aug 2010

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title = "Low loss chalcogenide glass waveguides by thermal nano-imprint lithography",

abstract = "We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.",

author = "Ting Han and Steve Madden and Douglas Bulla and Barry Luther-Davies",

year = "2010",

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doi = "10.1364/OE.18.019286",

language = "English",

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AU - Han, Ting

AU - Madden, Steve

AU - Bulla, Douglas

AU - Luther-Davies, Barry

PY - 2010/8/30

Y1 - 2010/8/30

N2 - We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

AB - We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

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U2 - 10.1364/OE.18.019286

DO - 10.1364/OE.18.019286

M3 - Article

SN - 1094-4087

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EP - 19291

JO - Optics Express

JF - Optics Express

IS - 18

ER -

Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

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