Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han; Steve Madden; Douglas Bulla; Barry Luther-Davies

doi:10.1364/OE.18.019286

Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han^*, Steve Madden, Douglas Bulla, Barry Luther-Davies

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

81 Citations (Scopus)

Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

Original language	English
Pages (from-to)	19286-19291
Number of pages	6
Journal	Optics Express
Volume	18
Issue number	18
DOIs	https://doi.org/10.1364/OE.18.019286
Publication status	Published - 30 Aug 2010

Access to Document

10.1364/OE.18.019286

Cite this

@article{5725558de684402baaeaeba56887fca6,

title = "Low loss chalcogenide glass waveguides by thermal nano-imprint lithography",

abstract = "We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.",

author = "Ting Han and Steve Madden and Douglas Bulla and Barry Luther-Davies",

year = "2010",

month = aug,

day = "30",

doi = "10.1364/OE.18.019286",

language = "English",

volume = "18",

pages = "19286--19291",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optica Publishing Group",

number = "18",

}

TY - JOUR

T1 - Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

AU - Han, Ting

AU - Madden, Steve

AU - Bulla, Douglas

AU - Luther-Davies, Barry

PY - 2010/8/30

Y1 - 2010/8/30

N2 - We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

AB - We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

UR - https://www.scopus.com/pages/publications/77956366411

U2 - 10.1364/OE.18.019286

DO - 10.1364/OE.18.019286

M3 - Article

SN - 1094-4087

VL - 18

SP - 19286

EP - 19291

JO - Optics Express

JF - Optics Express

IS - 18

ER -

Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

Abstract

Access to Document

Other files and links

Fingerprint

Cite this