@inproceedings{d81468d0697c4f09882c7d567b1ac036,
title = "Low loss stoichiometric TeO2 thin films and waveguides",
abstract = "Stoichiometric low loss Tellurium dioxide, TeO2, films have been produced by reactive magnetron RF sputtering. Long rib waveguides with very low loss are fabricated using reactive ion etching techniques. As-deposited TeO2 films and waveguides with propagation loss around or below 0.1dB/cm at 1550nm have been achieved.",
author = "Vu, {Khu T.} and Madden, {Steve J.} and Barry Luther-Davies",
year = "2009",
doi = "10.1364/cleo.2009.ctuee3",
language = "English",
isbn = "9781557528698",
series = "2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009",
publisher = "IEEE Computer Society",
booktitle = "2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009",
address = "United States",
note = "2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 ; Conference date: 02-06-2009 Through 04-06-2009",
}