Low loss stoichiometric TeO2 thin films and waveguides

Khu T. Vu, Steve J. Madden, Barry Luther-Davies

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    1 Citation (Scopus)

    Abstract

    Stoichiometric low loss Tellurium dioxide, TeO2, films have been produced by reactive magnetron RF sputtering. Long rib waveguides with very low loss are fabricated using reactive ion etching techniques. As-deposited TeO2 films and waveguides with propagation loss around or below 0.1dB/cm at 1550nm have been achieved.

    Original languageEnglish
    Title of host publication2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
    PublisherIEEE Computer Society
    ISBN (Print)9781557528698
    DOIs
    Publication statusPublished - 2009
    Event2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 - Baltimore, MD, United States
    Duration: 2 Jun 20094 Jun 2009

    Publication series

    Name2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009

    Conference

    Conference2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
    Country/TerritoryUnited States
    CityBaltimore, MD
    Period2/06/094/06/09

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