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Low stress, anomalous dispersive silicon nitride waveguides fabricated by reactive sputtering

  • Andreas Frigg
  • , Andreas Boes
  • , Guanghui Ren
  • , Duk Yong Choi
  • , Silvio Gees
  • , Arnan Mitchell

    Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › peer-review

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