Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma

Christian Sarra-Bournet*, Christine Charles, Rod Boswell

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    19 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma'. Together they form a unique fingerprint.

    Material Science

    Engineering