Abstract
The ion beam generated by a helicon double layer has been electrically steered up to 20° off axis by using a solenoid placed normal to the two axial solenoids of the helicon plasma source without significantly changing the beam exhaust velocity.
Original language | English |
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Article number | 201501 |
Journal | Applied Physics Letters |
Volume | 93 |
Issue number | 20 |
DOIs | |
Publication status | Published - 2008 |