Abstract
A capacitively coupled radiofrequency (rf) (13.56MHz) cylindrical argon micro-discharge expanding into a larger glass tube is studied by performing optical and electrical measurements over a pressure range 0.35Torr and a rf power range 540W. Measurements of the axial and radial plasma density profiles at the Paschen minimum near 1.5Torr are used to develop a global model of the discharge and estimate neutral heating from ionneutral charge exchange collisions for micro-propulsion applications.
Original language | English |
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Article number | 022002 |
Journal | Plasma Sources Science and Technology |
Volume | 21 |
Issue number | 2 |
DOIs | |
Publication status | Published - Apr 2012 |