Measurement of surface roughness in buried channel waveguides

F. Ladouceur; J. D. Love; T. J. Senden

doi:10.1049/el:19920839

Measurement of surface roughness in buried channel waveguides

F. Ladouceur^*, J. D. Love, T. J. Senden

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

43 Citations (Scopus)

Abstract

An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.

Original language	English
Pages (from-to)	1321-1322
Number of pages	2
Journal	Electronics Letters
Volume	28
Issue number	14
DOIs	https://doi.org/10.1049/el:19920839
Publication status	Published - 2 Jul 1992

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@article{3674333cbf904d05957f8a011ddd88cf,

title = "Measurement of surface roughness in buried channel waveguides",

abstract = "An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.",

keywords = "Losses, Optical waveguides, Scattering",

author = "F. Ladouceur and Love, {J. D.} and Senden, {T. J.}",

year = "1992",

month = jul,

day = "2",

doi = "10.1049/el:19920839",

language = "English",

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journal = "Electronics Letters",

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TY - JOUR

T1 - Measurement of surface roughness in buried channel waveguides

AU - Ladouceur, F.

AU - Love, J. D.

AU - Senden, T. J.

PY - 1992/7/2

Y1 - 1992/7/2

N2 - An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.

AB - An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.

KW - Losses

KW - Optical waveguides

KW - Scattering

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U2 - 10.1049/el:19920839

DO - 10.1049/el:19920839

M3 - Article

AN - SCOPUS:0027109191

SN - 0013-5194

VL - 28

SP - 1321

EP - 1322

JO - Electronics Letters

JF - Electronics Letters

IS - 14

ER -

Measurement of surface roughness in buried channel waveguides

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