Measurements of electron collision cross sections of relevance to plasma and gas discharge physics

Michael J. Brunger; Hyuck Cho; Hiroshi Tanaka; Stephen J. Buckman

doi:10.1143/JJAP.45.8183

Measurements of electron collision cross sections of relevance to plasma and gas discharge physics

Michael J. Brunger^*, Hyuck Cho, Hiroshi Tanaka, Stephen J. Buckman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Recent advances in the measurement of electron collisions with atoms and molecules are discussed and illustrated through their application to a range of targets of relevance to plasma and discharge technologies. Techniques that are discussed include, laser cooling and trapping, time-of flight spectroscopy, large angle scattering, and conventional energy loss spectroscopy. Their application to targets such as metastable helium, chloro- and flouro-carbons, SF₆ and H₂P are presented. Future studies involving molecular radical species are also discussed.

Original language	English
Pages (from-to)	8183-8187
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	45
Issue number	10 B
DOIs	https://doi.org/10.1143/JJAP.45.8183
Publication status	Published - 21 Oct 2006

Access to Document

10.1143/JJAP.45.8183

Cite this

@article{15c7df3bfa6a45cb877b79bc3c0544fc,

title = "Measurements of electron collision cross sections of relevance to plasma and gas discharge physics",

abstract = "Recent advances in the measurement of electron collisions with atoms and molecules are discussed and illustrated through their application to a range of targets of relevance to plasma and discharge technologies. Techniques that are discussed include, laser cooling and trapping, time-of flight spectroscopy, large angle scattering, and conventional energy loss spectroscopy. Their application to targets such as metastable helium, chloro- and flouro-carbons, SF6 and H2P are presented. Future studies involving molecular radical species are also discussed.",

keywords = "Cross sections, Electron scattering, Excitation, Gas discharges, Plasma processing",

author = "Brunger, \{Michael J.\} and Hyuck Cho and Hiroshi Tanaka and Buckman, \{Stephen J.\}",

year = "2006",

month = oct,

day = "21",

doi = "10.1143/JJAP.45.8183",

language = "English",

volume = "45",

pages = "8183--8187",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "10 B",

}

TY - JOUR

T1 - Measurements of electron collision cross sections of relevance to plasma and gas discharge physics

AU - Brunger, Michael J.

AU - Cho, Hyuck

AU - Tanaka, Hiroshi

AU - Buckman, Stephen J.

PY - 2006/10/21

Y1 - 2006/10/21

N2 - Recent advances in the measurement of electron collisions with atoms and molecules are discussed and illustrated through their application to a range of targets of relevance to plasma and discharge technologies. Techniques that are discussed include, laser cooling and trapping, time-of flight spectroscopy, large angle scattering, and conventional energy loss spectroscopy. Their application to targets such as metastable helium, chloro- and flouro-carbons, SF6 and H2P are presented. Future studies involving molecular radical species are also discussed.

AB - Recent advances in the measurement of electron collisions with atoms and molecules are discussed and illustrated through their application to a range of targets of relevance to plasma and discharge technologies. Techniques that are discussed include, laser cooling and trapping, time-of flight spectroscopy, large angle scattering, and conventional energy loss spectroscopy. Their application to targets such as metastable helium, chloro- and flouro-carbons, SF6 and H2P are presented. Future studies involving molecular radical species are also discussed.

KW - Cross sections

KW - Electron scattering

KW - Excitation

KW - Gas discharges

KW - Plasma processing

UR - https://www.scopus.com/pages/publications/34547160476

U2 - 10.1143/JJAP.45.8183

DO - 10.1143/JJAP.45.8183

M3 - Article

SN - 0021-4922

VL - 45

SP - 8183

EP - 8187

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 10 B

ER -

Measurements of electron collision cross sections of relevance to plasma and gas discharge physics

Abstract

Access to Document

Other files and links

Fingerprint

Cite this