Mechanochemical reaction and formation of an amorphous nitride phase during ball milling of Si in NH3

Z. L. Li; J. S. Williams; D. J. Llewellyn; M. Giersig

doi:10.1063/1.125247

Mechanochemical reaction and formation of an amorphous nitride phase during ball milling of Si in NH₃

Z. L. Li^*, J. S. Williams, D. J. Llewellyn, M. Giersig

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The formation of an amorphous Si_xN_yH phase is obtained by a solid-gas mechanochemical reaction induced by ball milling of Si in NH₃ gas. We suggest that mechanical damage together with absorbed N and H play an important role in the formation and stability of the amorphous Si_xN_yH phase during milling. Transmission electron microscopy, x-ray diffraction, thermal analysis, and composition analysis have been used to characterize the samples after ball milling and subsequent annealing. Crystallization of the amorphous phase to α-Si₃N₄ is observed at temperatures above 800°C.

Original language	English
Pages (from-to)	3111-3113
Number of pages	3
Journal	Applied Physics Letters
Volume	75
Issue number	20
DOIs	https://doi.org/10.1063/1.125247
Publication status	Published - 15 Nov 1999

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abstract = "The formation of an amorphous SixNyH phase is obtained by a solid-gas mechanochemical reaction induced by ball milling of Si in NH3 gas. We suggest that mechanical damage together with absorbed N and H play an important role in the formation and stability of the amorphous SixNyH phase during milling. Transmission electron microscopy, x-ray diffraction, thermal analysis, and composition analysis have been used to characterize the samples after ball milling and subsequent annealing. Crystallization of the amorphous phase to α-Si3N4 is observed at temperatures above 800°C.",

author = "Li, {Z. L.} and Williams, {J. S.} and Llewellyn, {D. J.} and M. Giersig",

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AU - Li, Z. L.

AU - Williams, J. S.

AU - Llewellyn, D. J.

AU - Giersig, M.

PY - 1999/11/15

Y1 - 1999/11/15

N2 - The formation of an amorphous SixNyH phase is obtained by a solid-gas mechanochemical reaction induced by ball milling of Si in NH3 gas. We suggest that mechanical damage together with absorbed N and H play an important role in the formation and stability of the amorphous SixNyH phase during milling. Transmission electron microscopy, x-ray diffraction, thermal analysis, and composition analysis have been used to characterize the samples after ball milling and subsequent annealing. Crystallization of the amorphous phase to α-Si3N4 is observed at temperatures above 800°C.

AB - The formation of an amorphous SixNyH phase is obtained by a solid-gas mechanochemical reaction induced by ball milling of Si in NH3 gas. We suggest that mechanical damage together with absorbed N and H play an important role in the formation and stability of the amorphous SixNyH phase during milling. Transmission electron microscopy, x-ray diffraction, thermal analysis, and composition analysis have been used to characterize the samples after ball milling and subsequent annealing. Crystallization of the amorphous phase to α-Si3N4 is observed at temperatures above 800°C.

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U2 - 10.1063/1.125247

DO - 10.1063/1.125247

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VL - 75

SP - 3111

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 20

ER -

Mechanochemical reaction and formation of an amorphous nitride phase during ball milling of Si in NH₃

Abstract

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