Abstract
The formation of an amorphous SixNyH phase is obtained by a solid-gas mechanochemical reaction induced by ball milling of Si in NH3 gas. We suggest that mechanical damage together with absorbed N and H play an important role in the formation and stability of the amorphous SixNyH phase during milling. Transmission electron microscopy, x-ray diffraction, thermal analysis, and composition analysis have been used to characterize the samples after ball milling and subsequent annealing. Crystallization of the amorphous phase to α-Si3N4 is observed at temperatures above 800°C.
| Original language | English |
|---|---|
| Pages (from-to) | 3111-3113 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 75 |
| Issue number | 20 |
| DOIs | |
| Publication status | Published - 15 Nov 1999 |