MeV implantation into semiconductors

J. S. Williams*, R. G. Elliman, M. C. Ridgway, C. Jagadish, S. L. Ellingboe, R. Goldberg, M. Petravic, W. C. Wong, Z. Dezhang, E. Nygren, B. G. Svensson

*Corresponding author for this work

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