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Mn implantation for new applications of 4H-SiC

  • M. K. Linnarsson*
  • , J. Wong-Leung
  • , A. Hallén
  • , S. I. Khartsev
  • , A. M. Grishin
  • *Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference Paperpeer-review

    1 Citation (Scopus)

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