Abstract
Silicon carbide (SiC) has emerged as a promising material platform for quantum photonics and nonlinear optics. These properties make the development of integrated photonic components in high-quality SiC a critical aspect for the advancement of scalable on-chip networks. In this work, we numerically design, fabricate, and demonstrate the performance of monolithic metalenses from SiC suitable for on-chip optical operations. We engineer two distinct lenses, with parabolic and cubic phase profiles, operating in the near-infrared spectral range, which is of interest for quantum and photonic applications. We support the lens fabrication by optical transmission measurement and characterize the focal points of the lenses. Our results will accelerate the development of SiC nanophotonic devices and aid in an on-chip integration of quantum emitters with metaoptical components.
Original language | English |
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Pages (from-to) | 1409-1414 |
Number of pages | 6 |
Journal | ACS Photonics |
Volume | 9 |
Issue number | 4 |
DOIs | |
Publication status | Published - 20 Apr 2022 |