Multifunction study of PZT thin films on amorphous and polycrystalline substrates

Chao Nan Xu; Yun Liu; Morito Akiyama; Kazuhiro Nonaka

doi:10.1080/00150190108225192

Multifunction study of PZT thin films on amorphous and polycrystalline substrates

Chao Nan Xu, Yun Liu, Morito Akiyama, Kazuhiro Nonaka

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The multifunctions of the PZT films deposited on amorphous and polycrystalline substrates have been investigated and compared with those on the single crystals substrate. With using a perovskite type film of LaNiO3 (LNO) as the buffer layer, oriented or prefer oriented PZT thin films were successfully deposited on glass, stainless steel and ceramic substrates of Al2O3, SiC, and Si3N4. These PZT/LNO/substrate systems possess high dielectricity, ferroelectricity and piezoelectricity. It is demonstrated that the PZT thin film can not only act as a ferroelectric memory but also can act as an artificial skin to sense various mechanical stress applied on the substrates, such as mechanical impacts and stress changes. The PZT/LNO deposited on amorphous and ceramics substrates were capable of sensing crack and fractures of the substrates.

Original language	English
Pages (from-to)	155-160
Number of pages	6
Journal	Ferroelectrics
Volume	263
Issue number	1
DOIs	https://doi.org/10.1080/00150190108225192
Publication status	Published - 2001
Externally published	Yes

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@article{12f4b3af84ce4bdb89097329e0527c4e,

title = "Multifunction study of PZT thin films on amorphous and polycrystalline substrates",

abstract = "The multifunctions of the PZT films deposited on amorphous and polycrystalline substrates have been investigated and compared with those on the single crystals substrate. With using a perovskite type film of LaNiO3 (LNO) as the buffer layer, oriented or prefer oriented PZT thin films were successfully deposited on glass, stainless steel and ceramic substrates of Al2O3, SiC, and Si3N4. These PZT/LNO/substrate systems possess high dielectricity, ferroelectricity and piezoelectricity. It is demonstrated that the PZT thin film can not only act as a ferroelectric memory but also can act as an artificial skin to sense various mechanical stress applied on the substrates, such as mechanical impacts and stress changes. The PZT/LNO deposited on amorphous and ceramics substrates were capable of sensing crack and fractures of the substrates.",

keywords = "PZT thin film, dielectricity, ferroelectric memory, ferroelectricity, piezoelectricity, stress sensor",

author = "Xu, {Chao Nan} and Yun Liu and Morito Akiyama and Kazuhiro Nonaka",

year = "2001",

doi = "10.1080/00150190108225192",

language = "English",

volume = "263",

pages = "155--160",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "1",

}

TY - JOUR

T1 - Multifunction study of PZT thin films on amorphous and polycrystalline substrates

AU - Xu, Chao Nan

AU - Liu, Yun

AU - Akiyama, Morito

AU - Nonaka, Kazuhiro

PY - 2001

Y1 - 2001

N2 - The multifunctions of the PZT films deposited on amorphous and polycrystalline substrates have been investigated and compared with those on the single crystals substrate. With using a perovskite type film of LaNiO3 (LNO) as the buffer layer, oriented or prefer oriented PZT thin films were successfully deposited on glass, stainless steel and ceramic substrates of Al2O3, SiC, and Si3N4. These PZT/LNO/substrate systems possess high dielectricity, ferroelectricity and piezoelectricity. It is demonstrated that the PZT thin film can not only act as a ferroelectric memory but also can act as an artificial skin to sense various mechanical stress applied on the substrates, such as mechanical impacts and stress changes. The PZT/LNO deposited on amorphous and ceramics substrates were capable of sensing crack and fractures of the substrates.

AB - The multifunctions of the PZT films deposited on amorphous and polycrystalline substrates have been investigated and compared with those on the single crystals substrate. With using a perovskite type film of LaNiO3 (LNO) as the buffer layer, oriented or prefer oriented PZT thin films were successfully deposited on glass, stainless steel and ceramic substrates of Al2O3, SiC, and Si3N4. These PZT/LNO/substrate systems possess high dielectricity, ferroelectricity and piezoelectricity. It is demonstrated that the PZT thin film can not only act as a ferroelectric memory but also can act as an artificial skin to sense various mechanical stress applied on the substrates, such as mechanical impacts and stress changes. The PZT/LNO deposited on amorphous and ceramics substrates were capable of sensing crack and fractures of the substrates.

KW - PZT thin film

KW - dielectricity

KW - ferroelectric memory

KW - ferroelectricity

KW - piezoelectricity

KW - stress sensor

UR - http://www.scopus.com/inward/record.url?scp=34848877678&partnerID=8YFLogxK

U2 - 10.1080/00150190108225192

DO - 10.1080/00150190108225192

M3 - Article

SN - 0015-0193

VL - 263

SP - 155

EP - 160

JO - Ferroelectrics

JF - Ferroelectrics

IS - 1

ER -

Multifunction study of PZT thin films on amorphous and polycrystalline substrates

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