Multilayer pyroelectric thin film with a gradient thermal insulating layer

Yun Liu*, Wei Ren, Liang Ying Zhang, Xi Yao, Chao Nan Xu, Hiroshi Tateyama

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

The multilayer pyroelectric thin film (MPTF) was composed of a pyroelectric PLT thin film and a gradient thermal insulation layer (GTIL). This GTIL was proposed to improve the surface roughness of the thicker porous films, which consisted of multilayer porous SiO2 films with different porosities. As a result, this MPTF retained the excellent electric properties while greatly intensifying its voltage sensitivity and detectivity by preparing the thick and smooth GTIL. The experimental result also showed that the voltage response of the MPTF with a GTIL thickness of 3μm increased more than 10 times in comparison with one of the PLT film directly deposited on the silicon substrate.

Original languageEnglish
Pages (from-to)137-142
Number of pages6
JournalFerroelectrics
Volume263
Issue number1
DOIs
Publication statusPublished - 2001
Externally publishedYes

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