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N-type polysilicon passivating contacts using ultra-thin PECVD silicon oxynitrides as the interfacial layer

  • Wenhao Chen*
  • , Josua Stuckelberger
  • , Wenjie Wang
  • , Sieu Pheng Phang
  • , Daniel Macdonald
  • , Yimao Wan
  • , Di Yan*
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    10 Citations (Scopus)

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