Abstract
Reaching nanometer length scales presents something of a crossover point where the properties of bulk materials start to break down and atomic character emerges. Top-down describes the traditional approach to miniaturization, whereby features are introduced into a bulk material with ever increasing precision. Nanoscale thin films are a somewhat mature technology with a broad base of applications across scientific and engineering fields. More development of 2-D nanostructures is expected to come in the form of advanced materials such as the organic nanosheet graphene and precision fabrication techniques such as atomic layer deposition.
Original language | English |
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Article number | 4745648 |
Pages (from-to) | 1895-1897 |
Number of pages | 3 |
Journal | Proceedings of the IEEE |
Volume | 96 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2008 |