Abstract
Reaching nanometer length scales presents something of a crossover point where the properties of bulk materials start to break down and atomic character emerges. Top-down describes the traditional approach to miniaturization, whereby features are introduced into a bulk material with ever increasing precision. Nanoscale thin films are a somewhat mature technology with a broad base of applications across scientific and engineering fields. More development of 2-D nanostructures is expected to come in the form of advanced materials such as the organic nanosheet graphene and precision fabrication techniques such as atomic layer deposition.
| Original language | English |
|---|---|
| Article number | 4745648 |
| Pages (from-to) | 1895-1897 |
| Number of pages | 3 |
| Journal | Proceedings of the IEEE |
| Volume | 96 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2008 |