Nanoscale materials modification for device applications

    Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

    Original languageEnglish
    Title of host publicationIon Beams in Nanoscience and Technology
    EditorsR. Hellborg, H. Whitlow, Y. Zhang
    Place of PublicationBerlin
    PublisherSpringer
    Pages329-355
    Volume1
    ISBN (Print)9783642006227
    Publication statusPublished - 2009

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