Nanoscale Precision of 3D Polymerization via Polarization Control

Sima Rekštytė; Tomas Jonavičius; Darius Gailevičius; Mangirdas Malinauskas; Vygantas Mizeikis; Eugene G. Gamaly; Saulius Juodkazis

doi:10.1002/adom.201600155

Nanoscale Precision of 3D Polymerization via Polarization Control

Sima Rekštytė, Tomas Jonavičius, Darius Gailevičius, Mangirdas Malinauskas^*, Vygantas Mizeikis, Eugene G. Gamaly, Saulius Juodkazis

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

95 Citations (Scopus)

Abstract

Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to â‰ˆ20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.

Original language	English
Pages (from-to)	1209-1214
Number of pages	6
Journal	Advanced Optical Materials
Volume	4
Issue number	8
DOIs	https://doi.org/10.1002/adom.201600155
Publication status	Published - 1 Aug 2016

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10.1002/adom.201600155

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AU - Rekštytė, Sima

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AU - Gailevičius, Darius

AU - Malinauskas, Mangirdas

AU - Mizeikis, Vygantas

AU - Gamaly, Eugene G.

AU - Juodkazis, Saulius

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AB - Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to â‰ˆ20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.

KW - femtosecond pulses

KW - laser nanolithography

KW - optical 3D printing

KW - polarization

KW - voxel-aspect ratios

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JO - Advanced Optical Materials

JF - Advanced Optical Materials

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ER -

Nanoscale Precision of 3D Polymerization via Polarization Control

Abstract

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