Nanoscale Precision of 3D Polymerization via Polarization Control

Sima Rekštytė; Tomas Jonavičius; Darius Gailevičius; Mangirdas Malinauskas; Vygantas Mizeikis; Eugene G. Gamaly; Saulius Juodkazis

doi:10.1002/adom.201600155

Nanoscale Precision of 3D Polymerization via Polarization Control

Sima Rekštytė, Tomas Jonavičius, Darius Gailevičius, Mangirdas Malinauskas^*, Vygantas Mizeikis, Eugene G. Gamaly, Saulius Juodkazis

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

101 Citations (Scopus)

Abstract

Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to â‰ˆ20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.

Original language	English
Pages (from-to)	1209-1214
Number of pages	6
Journal	Advanced Optical Materials
Volume	4
Issue number	8
DOIs	https://doi.org/10.1002/adom.201600155
Publication status	Published - 1 Aug 2016

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10.1002/adom.201600155

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@article{4f8f6d3697284139be1ff781d0131715,

title = "Nanoscale Precision of 3D Polymerization via Polarization Control",

abstract = "Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to {\^a}‰ˆ20\% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.",

keywords = "femtosecond pulses, laser nanolithography, optical 3D printing, polarization, voxel-aspect ratios",

author = "Sima Rek{\v s}tytė and Tomas Jonavi{\v c}ius and Darius Gailevi{\v c}ius and Mangirdas Malinauskas and Vygantas Mizeikis and Gamaly, \{Eugene G.\} and Saulius Juodkazis",

year = "2016",

month = aug,

day = "1",

doi = "10.1002/adom.201600155",

language = "English",

volume = "4",

pages = "1209--1214",

journal = "Advanced Optical Materials",

issn = "2195-1071",

publisher = "John Wiley \& Sons Inc.",

number = "8",

}

TY - JOUR

T1 - Nanoscale Precision of 3D Polymerization via Polarization Control

AU - Rekštytė, Sima

AU - Jonavičius, Tomas

AU - Gailevičius, Darius

AU - Malinauskas, Mangirdas

AU - Mizeikis, Vygantas

AU - Gamaly, Eugene G.

AU - Juodkazis, Saulius

PY - 2016/8/1

Y1 - 2016/8/1

N2 - Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to â‰ˆ20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.

AB - Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to â‰ˆ20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.

KW - femtosecond pulses

KW - laser nanolithography

KW - optical 3D printing

KW - polarization

KW - voxel-aspect ratios

UR - https://www.scopus.com/pages/publications/84971569557

U2 - 10.1002/adom.201600155

DO - 10.1002/adom.201600155

M3 - Article

SN - 2195-1071

VL - 4

SP - 1209

EP - 1214

JO - Advanced Optical Materials

JF - Advanced Optical Materials

IS - 8

ER -

Nanoscale Precision of 3D Polymerization via Polarization Control

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