TY - JOUR
T1 - Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition
T2 - Conformal Coating and Nanocavity Formation
AU - Ruff, Philip
AU - Carrillo-Solano, Mercedes
AU - Ulrich, Nils
AU - Hadley, Andrea
AU - Kluth, Patrick
AU - Toimil-Molares, Maria Eugenia
AU - Trautmann, Christina
AU - Hess, Christian
N1 - Publisher Copyright:
© 2018 Walter de Gruyter GmbH, Berlin/Boston.
PY - 2018/7/26
Y1 - 2018/7/26
N2 - Nanoscale structuring in confined geometries using atomic layer deposition (ALD) is demonstrated for surfaces of nanochannels in track-etched polymer membranes and in mesoporous silica (SBA-15). Suitable process conditions for conformal ALD coating of polymer membranes and SBA-15 with inorganic oxides (SiO2, TiO2, Al2O3) were developed. On the basis of the oxide-coated layers, nanochannels were further structured by a molecular-templated ALD approach, where calixarene macromolecules are covalently attached to the surface and then embedded into an Al2O3 layer. The removal of calixarene by ozone treatment results in 1-2 nm wide surface nanocavities. Surfaces exposed to different process steps are analyzed by small angle X-ray scattering (SAXS) as well as by X-ray photoelectron and infrared spectroscopy. The proposed nanostructuring process increases the overall surface area, allows controlling the hydrophilicity of the channel surface, and is of interest for studying water and ion transport in confinement.
AB - Nanoscale structuring in confined geometries using atomic layer deposition (ALD) is demonstrated for surfaces of nanochannels in track-etched polymer membranes and in mesoporous silica (SBA-15). Suitable process conditions for conformal ALD coating of polymer membranes and SBA-15 with inorganic oxides (SiO2, TiO2, Al2O3) were developed. On the basis of the oxide-coated layers, nanochannels were further structured by a molecular-templated ALD approach, where calixarene macromolecules are covalently attached to the surface and then embedded into an Al2O3 layer. The removal of calixarene by ozone treatment results in 1-2 nm wide surface nanocavities. Surfaces exposed to different process steps are analyzed by small angle X-ray scattering (SAXS) as well as by X-ray photoelectron and infrared spectroscopy. The proposed nanostructuring process increases the overall surface area, allows controlling the hydrophilicity of the channel surface, and is of interest for studying water and ion transport in confinement.
KW - atomic layer deposition
KW - confined geometry
KW - hydrophilicity
KW - mesoporous silica
KW - nanocavity
KW - nanoscale structuring
KW - track-etched polymer membrane
UR - http://www.scopus.com/inward/record.url?scp=85048779354&partnerID=8YFLogxK
U2 - 10.1515/zpch-2017-1058
DO - 10.1515/zpch-2017-1058
M3 - Article
SN - 0942-9352
VL - 232
SP - 1147
EP - 1171
JO - Zeitschrift fur Physikalische Chemie
JF - Zeitschrift fur Physikalische Chemie
IS - 7-8
ER -