Negative Ion Distribution in an SF6 Helicon Discharge Measured Using Electrostatic Probes

Pascal Chabert, T Sheridan, Roderick Boswell, J Perrin

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	561-566
Journal	Plasma Sources Science and Technology
Volume	8
Publication status	Published - 1999

Cite this

@article{085e6844fb0348449db0e66af3c3b27e,

title = "Negative Ion Distribution in an SF6 Helicon Discharge Measured Using Electrostatic Probes",

author = "Pascal Chabert and T Sheridan and Roderick Boswell and J Perrin",

year = "1999",

language = "English",

volume = "8",

pages = "561--566",

journal = "Plasma Sources Science and Technology",

publisher = "Institute of Physics Publishing",

}