Neutral gas heating and ion transport in a constricted plasma flow

Teck Seng Ho*, Christine Charles, Rod Boswell

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    16 Citations (Scopus)

    Abstract

    Ion-neutral charge exchange collisions are demonstrated to be the dominant heating mechanism in a weakly ionised ∼1 Torr Ar capacitively coupled radiofrequency plasma flowing through a cylinder. In this rarefied regime, thermal conduction is ineffective. The neutral gas temperature is significantly higher in the plasma bulk than in the plasma sheath due to different plasma parameters and ion transport behaviours in these regions. This study is achieved in a computational fluid dynamics and plasma simulation, and is applicable to similar plasmas at different pressures and physical scales.

    Original languageEnglish
    Article number084501
    JournalPhysics of Plasmas
    Volume24
    Issue number8
    DOIs
    Publication statusPublished - 1 Aug 2017

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