Abstract
Ion-neutral charge exchange collisions are demonstrated to be the dominant heating mechanism in a weakly ionised ∼1 Torr Ar capacitively coupled radiofrequency plasma flowing through a cylinder. In this rarefied regime, thermal conduction is ineffective. The neutral gas temperature is significantly higher in the plasma bulk than in the plasma sheath due to different plasma parameters and ion transport behaviours in these regions. This study is achieved in a computational fluid dynamics and plasma simulation, and is applicable to similar plasmas at different pressures and physical scales.
Original language | English |
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Article number | 084501 |
Journal | Physics of Plasmas |
Volume | 24 |
Issue number | 8 |
DOIs | |
Publication status | Published - 1 Aug 2017 |