Nonlinearity compensation for improved nanopositioning of atomic force microscope

M. S. Rana, H. R. Pota, I. R. Petersen, Habibullah

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

This article presents the design and experimental implementation of an observer-based model predictive control (OMPC) scheme with a notch filter which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibration in piezoactuators in order to improve the nanopositioning of an atomic force microscope (AFM). The controller design is based on an identified model of the piezoelectric tube scanner (PTS) for which the control scheme achieves significant compensation of its creep, hysteresis, cross-coupling, and vibration effects and ensures better tracking of the reference signal. A Kalman filter is used to obtain full-state information of the plant. The experimental results exemplify the use of this proposed control scheme.

Original languageEnglish
Title of host publication2013 IEEE International Conference on Control Applications, CCA 2013
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages461-466
Number of pages6
ISBN (Print)9781479915590
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 IEEE International Conference on Control Applications, CCA 2013 - Hyderabad, India
Duration: 28 Aug 201330 Aug 2013

Publication series

NameProceedings of the IEEE International Conference on Control Applications

Conference

Conference2013 IEEE International Conference on Control Applications, CCA 2013
Country/TerritoryIndia
CityHyderabad
Period28/08/1330/08/13

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