On the Angular Dependence of Profile Broadening in Silicon Under Oxygen and Nitrogen Bombardment

Mladen Petravic, Prakash Deenapanray, Caroline Demangel, D-S Moon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Proceedings of the 12th International Conference on Secondary Ion Mass Spetrometry
Editors	Benninghoven, A.; Bertrand, P.; Migeon, H.N.; Werner, H.W.
Place of Publication	Amsterdam
Publisher	Elsevier
Pages	545-548
Edition	Peer Reviewed
ISBN (Print)	0444503234
Publication status	Published - 2000
Event	Secondary Ion Mass Spectrometry (SIMS 1999) - Brussels Belgium Duration: 1 Jan 2000 → …

Conference	Secondary Ion Mass Spectrometry (SIMS 1999)
Period	1/01/00 → …
Other	May 9 1999

Cite this

Petravic, Mladen ; Deenapanray, Prakash ; Demangel, Caroline et al. / On the Angular Dependence of Profile Broadening in Silicon Under Oxygen and Nitrogen Bombardment. Proceedings of the 12th International Conference on Secondary Ion Mass Spetrometry. editor / Benninghoven, A.; Bertrand, P.; Migeon, H.N.; Werner, H.W. Peer Reviewed. ed. Amsterdam : Elsevier, 2000. pp. 545-548

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author = "Mladen Petravic and Prakash Deenapanray and Caroline Demangel and D-S Moon",

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editor = "{Benninghoven, A.; Bertrand, P.; Migeon, H.N.; Werner, H.W.}",

booktitle = "Proceedings of the 12th International Conference on Secondary Ion Mass Spetrometry",

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note = "Secondary Ion Mass Spectrometry (SIMS 1999) ; Conference date: 01-01-2000",

}

On the Angular Dependence of Profile Broadening in Silicon Under Oxygen and Nitrogen Bombardment. / Petravic, Mladen; Deenapanray, Prakash; Demangel, Caroline et al.
Proceedings of the 12th International Conference on Secondary Ion Mass Spetrometry. ed. / Benninghoven, A.; Bertrand, P.; Migeon, H.N.; Werner, H.W. Peer Reviewed. ed. Amsterdam: Elsevier, 2000. p. 545-548.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - On the Angular Dependence of Profile Broadening in Silicon Under Oxygen and Nitrogen Bombardment

AU - Petravic, Mladen

AU - Deenapanray, Prakash

AU - Demangel, Caroline

AU - Moon, D-S

PY - 2000

Y1 - 2000

M3 - Conference contribution

SN - 0444503234

SP - 545

EP - 548

BT - Proceedings of the 12th International Conference on Secondary Ion Mass Spetrometry

A2 - null, Benninghoven, A.; Bertrand, P.; Migeon, H.N.; Werner, H.W.

PB - Elsevier

CY - Amsterdam

T2 - Secondary Ion Mass Spectrometry (SIMS 1999)

Y2 - 1 January 2000

ER -