Optical Evaluation of Silicon Wafers with Rounded Rear Pyramids

Keith R. McIntosh*, Ngwe Zin, Hieu T. Nguyen, Matthew Stocks, Evan Franklin, Kean C. Fong, Teng C. Kho, Teck K. Chong, Er Chien Wang, Tom Ratcliff, Daniel Macdonald, Andrew W. Blakers

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    11 Citations (Scopus)

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