@inproceedings{15a0a4bf2ffa411c887d9a647daacb40,
title = "Optical frequency comb generation using low stress reactive sputtered silicon nitride waveguides",
abstract = "We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6. 6\times 10^{5} based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.",
author = "Andreas Frigg and Andreas Boes and Guanghui Ren and Nguyen, {Thach G.} and Choi, {Duk Yong} and Silvio Gees and David Moss and Arnan Mitchell",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2020 ; Conference date: 03-08-2020 Through 05-08-2020",
year = "2020",
month = aug,
doi = "10.1364/CLEOPR.2020.C2C_3",
language = "English",
series = "2020 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2020 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2020 - Proceedings",
address = "United States",
}