Abstract
The structural and luminescence properties of nc-Si in (11̄02) sapphires were analyzed using cathodoluminescence (CL), photoluminescence (PL), and transmission electron microscopy (TEM). Si crystallite of about 4 to 5 nm diameter were created by implantation with 30-keV Si ions and sunsequent annealing at 1100 °C with extended defects. The anealing temperature and the implant dose strongly affected the luminescence properties of the samples which were compared to O-- and Al--implanted Al 2O3. All the other bands were found to be defect related, with the exception of CL band, that was nanocrystal related.
Original language | English |
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Pages (from-to) | 2667-2669 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 84 |
Issue number | 14 |
DOIs | |
Publication status | Published - 5 Apr 2004 |