@inproceedings{b40d20f12d2c405a9cb77c1b96428e75,
title = "Overview of PECVD Silicon Nitride for Solar Cells",
author = "Andres Cuevas and Mark Kerr and Jan Schmidt",
year = "2003",
language = "English",
isbn = "0975065017",
pages = "502--510",
editor = "{Lu Aye, W W S Charters}",
booktitle = "ANZSES 2003 - Destination Renewables from research to market",
publisher = "Australian and New Zealand Solar Energy Society (ANZSES)",
edition = "Peer Reviewed",
note = "Australia and New Zealand Solar Energy Society Conference (Solar 2003) ; Conference date: 01-01-2003",
}