Particle in cell simulation of a radiofrequency plasma jet expanding in vacuum

C. Charles; R. Hawkins; R. W. Boswell

doi:10.1063/1.4914109

Particle in cell simulation of a radiofrequency plasma jet expanding in vacuum

C. Charles, R. Hawkins, R. W. Boswell

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11 Citations (Scopus)

Abstract

The effect of a pressure gradient (∼133-Pa-0.133 Pa) on electron and ion energy distributions in a radiofrequency (rf at 13.56 MHz) argon plasma jet is studied using a 1D-3v Particle In Cell (PIC) simulation. The PIC domain is three times that of the 0.018m long plasma cavity and the total simulation time is 1 ms. Ion heating and acceleration up to a drift velocity about 2000 m s^-1 are measured along the jet's main expansion axis. Elastic and charge exchange ion-neutral collisions histograms computed at equilibrium during 0.74 ms show that charge exchange collisions act as the main neutral heating mechanism.

Original language	English
Article number	093502
Journal	Applied Physics Letters
Volume	106
Issue number	9
DOIs	https://doi.org/10.1063/1.4914109
Publication status	Published - 2 Mar 2015

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10.1063/1.4914109

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title = "Particle in cell simulation of a radiofrequency plasma jet expanding in vacuum",

abstract = "The effect of a pressure gradient (∼133-Pa-0.133 Pa) on electron and ion energy distributions in a radiofrequency (rf at 13.56 MHz) argon plasma jet is studied using a 1D-3v Particle In Cell (PIC) simulation. The PIC domain is three times that of the 0.018m long plasma cavity and the total simulation time is 1 ms. Ion heating and acceleration up to a drift velocity about 2000 m s-1 are measured along the jet's main expansion axis. Elastic and charge exchange ion-neutral collisions histograms computed at equilibrium during 0.74 ms show that charge exchange collisions act as the main neutral heating mechanism.",

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AU - Hawkins, R.

AU - Boswell, R. W.

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N2 - The effect of a pressure gradient (∼133-Pa-0.133 Pa) on electron and ion energy distributions in a radiofrequency (rf at 13.56 MHz) argon plasma jet is studied using a 1D-3v Particle In Cell (PIC) simulation. The PIC domain is three times that of the 0.018m long plasma cavity and the total simulation time is 1 ms. Ion heating and acceleration up to a drift velocity about 2000 m s-1 are measured along the jet's main expansion axis. Elastic and charge exchange ion-neutral collisions histograms computed at equilibrium during 0.74 ms show that charge exchange collisions act as the main neutral heating mechanism.

AB - The effect of a pressure gradient (∼133-Pa-0.133 Pa) on electron and ion energy distributions in a radiofrequency (rf at 13.56 MHz) argon plasma jet is studied using a 1D-3v Particle In Cell (PIC) simulation. The PIC domain is three times that of the 0.018m long plasma cavity and the total simulation time is 1 ms. Ion heating and acceleration up to a drift velocity about 2000 m s-1 are measured along the jet's main expansion axis. Elastic and charge exchange ion-neutral collisions histograms computed at equilibrium during 0.74 ms show that charge exchange collisions act as the main neutral heating mechanism.

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JF - Applied Physics Letters

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ER -

Particle in cell simulation of a radiofrequency plasma jet expanding in vacuum

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