Passivation and depassivation of Si-SiO2 interfaces with atomic hydrogen

C. Zhang*, K. J. Weber, H. Jin

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    17 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Passivation and depassivation of Si-SiO2 interfaces with atomic hydrogen'. Together they form a unique fingerprint.

    Material Science

    Engineering