Skip to main navigation Skip to search Skip to main content

Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride

  • Yimao Wan*
  • , James Bullock
  • , Andres Cuevas
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    38 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride'. Together they form a unique fingerprint.
    Sort by

    Engineering

    Material Science