Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation
- Kean Chern Fong*
- , Teng Choon Kho
- , Wen Sheng Liang
- , Teck Kong Chong
- , Marco Ernst
- , Daniel Walter
- , Matthew Stocks
- , Evan Franklin
- , Keith McIntosh
- , Andrew Blakers
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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