Plasma ammonia passivation of SiN/SiO2/Si stacks

Hao Jin, Klaus Weber, Andrew Blakers

    Research output: Contribution to conference › Paper › peer-review

    Original languageEnglish
    Publication statusPublished - 2006
    EventInternational Conference on New Energy Materials - Beijing, China, China
    Duration: 1 Jan 2006 → …

    Conference

    ConferenceInternational Conference on New Energy Materials
    Country/TerritoryChina
    Period1/01/06 → …
    OtherJune 25-30, 2006

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