Plasma expansion from a radio frequency microdischarge

Rod Boswell; Christine Charles; Peter Alexander; James Dedrick; Kazunori Takahashi

doi:10.1109/TPS.2011.2143434

Plasma expansion from a radio frequency microdischarge

Rod Boswell^*, Christine Charles, Peter Alexander, James Dedrick, Kazunori Takahashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.

Original language	English
Article number	5771122
Pages (from-to)	2512-2513
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	39
Issue number	11 PART 1
DOIs	https://doi.org/10.1109/TPS.2011.2143434
Publication status	Published - Nov 2011

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10.1109/TPS.2011.2143434

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abstract = "Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.",

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AU - Boswell, Rod

AU - Charles, Christine

AU - Alexander, Peter

AU - Dedrick, James

AU - Takahashi, Kazunori

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N2 - Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.

AB - Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.

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KW - plasma sources

UR - https://www.scopus.com/pages/publications/81255133976

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DO - 10.1109/TPS.2011.2143434

M3 - Article

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JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

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Plasma expansion from a radio frequency microdischarge

Abstract

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