Plasma-immersion ion implantation of the interior surface of a small cylindrical bore using an auxiliary electrode for finite rise-time voltage pulses

Xuchu Zeng*, Tat Kun Kwok, Aiguo Liu, Paul K. Chu, Baoyin Tang, Terrence E. Sheridan

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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    Chemical Engineering

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