Plasma ionization in low-pressure radio-frequency discharges - Part I: Optical measurements

Deborah O'Connell; Timo Gans; Albert Meige; Peter Awakowicz; Rod W. Boswell

doi:10.1109/TPS.2008.927348

Plasma ionization in low-pressure radio-frequency discharges - Part I: Optical measurements

Deborah O'Connell^*, Timo Gans, Albert Meige, Peter Awakowicz, Rod W. Boswell

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

Original language	English
Pages (from-to)	1382-1383
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	36
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/TPS.2008.927348
Publication status	Published - Aug 2008

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10.1109/TPS.2008.927348

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@article{d58f1af108f04fbfa9cd7f8eb7631ae3,

title = "Plasma ionization in low-pressure radio-frequency discharges - Part I: Optical measurements",

abstract = "The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.",

keywords = "Capacitively coupled plasmas, Discharges, Electric field reversal, Electric fields, Electrodes, Heating, Ionization, Phase resolved optical emission spectroscopy, Plasma diagnostics, Plasma ionization, Plasmas, Radio frequency, Radio-frequency plasmas, Wave-particle interaction",

author = "Deborah O'Connell and Timo Gans and Albert Meige and Peter Awakowicz and Boswell, \{Rod W.\}",

year = "2008",

month = aug,

doi = "10.1109/TPS.2008.927348",

language = "English",

volume = "36",

pages = "1382--1383",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4 PART 1",

}

TY - JOUR

T1 - Plasma ionization in low-pressure radio-frequency discharges - Part I

T2 - Optical measurements

AU - O'Connell, Deborah

AU - Gans, Timo

AU - Meige, Albert

AU - Awakowicz, Peter

AU - Boswell, Rod W.

PY - 2008/8

Y1 - 2008/8

N2 - The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

AB - The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

KW - Capacitively coupled plasmas

KW - Discharges

KW - Electric field reversal

KW - Electric fields

KW - Electrodes

KW - Heating

KW - Ionization

KW - Phase resolved optical emission spectroscopy

KW - Plasma diagnostics

KW - Plasma ionization

KW - Plasmas

KW - Radio frequency

KW - Radio-frequency plasmas

KW - Wave-particle interaction

UR - https://www.scopus.com/pages/publications/50249141305

U2 - 10.1109/TPS.2008.927348

DO - 10.1109/TPS.2008.927348

M3 - Article

SN - 0093-3813

VL - 36

SP - 1382

EP - 1383

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 4 PART 1

ER -

Plasma ionization in low-pressure radio-frequency discharges - Part I: Optical measurements

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