Plasma under control: Advanced solutions and perspectives for plasma flux management in material treatment and nanosynthesis
- O. Baranov
- , K. Bazaka
- , H. Kersten
- , M. Keidar
- , U. Cvelbar
- , S. Xu
- , I. Levchenko
Research output: Contribution to journal › Article › peer-review
79
Citations
(Scopus)