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Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm
S. J. Utteridge*, V. A. Sashin, S. A. Canney, M. J. Ford, Z. Fang, D. R. Oliver, M. Vos, E. Weigold
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
15
Citations
(Scopus)